172nm Excimer Irradiation Technology
Thanks to our valuable partnership with Chiyoda Kogyo Co., Ltd., based in Japan, we have been able to deliver the excellent 172nm excimer irradiation technology from Ushio, a world-renowned and industry-leading manufacturer, for various high-tech and industrial applications.
The lamps are crafted by highly skilled artisans, with an unwavering commitment to excellence, utilizing the highest quality materials that meet strict manufacturing standards to ensure there are no impurities or defects.
While featuring peak wavelength at 172nm, Ushio excimer lamps can be customized up to 280nm with an available custom designed power supply. The power, length and diameter of the lamp can be modified to fit virtually any present equipment or designed specifically for any new equipment.
Manufacturing at an ISO 9001 certified facility, with a focus on quality control and large production capacity, makes Ushio an ideal OEM partner for delivering consistent quality lamps with reliable distribution.
Vacuum Ultraviolet
Vacuum ultraviolet (VUV) is ultraviolet light that requires a vacuum in order to travel freely. The VUV spectrum covers all wavelengths between 120 and 240 nanometers. Most atmospheric gases fully absorb these wavelengths of light but a select few, at specific wavelengths, allow these rays to pass through.
Excimer Vacuum Ultraviolet (VUV), a powerful form of light energy, can be generated by lamps filled with noble gases or noble gas compounds.
When applied with high energy from an external source, these lamps generate a dielectric barrier discharge plasma, which excites the gas atoms, causing them to instantly produce an excimer state (Xe). When the excited state of the atoms returns to its original state, light spectra peculiar to the excimer state is emitted. This emission light is known as excimer vacuum ultraviolet (VUV).
Structures of 172nm Excimer Lamp
Ushio’s decades of investment and efforts have led to breakthroughs in Excimer Lamps – both round tubes and flat tubes – emitting only a 172nm single wavelength to cater to all specific industrial and technical requirements.
Characteristics of 172nm Excimer Lamp
- Excellent monochromaticity, concentrated ultraviolet output energy, and high ultraviolet intensity, reaching up to 100 mW/cm².
- Incoherent light is advantageous for large-area processing, without the electrode corrosion inherent in traditional light sources, significantly extending the lifespan.
- Instantaneous on/off capability without preheating or shutter requirements, and the switch frequency does not affect the lifespan.
- Unaffected by ambient temperature during startup and operation; it is a cold light source that does not emit infrared radiation, resulting in minimal heating effects on the treated objects.
- Environmentally friendly manufacturing without the need for mercury, avoiding secondary pollution and facilitating recycling.
Key Technical Advantages
Applications of 172 nm Excimer Lamp
- Surface Cleaning: Used in the cleaning process for semiconductor wafers and flat-panel displays to remove photoresist.
- Surface Etching and Modification: Applied to materials like polyimide and fluorine compounds.
- Low-Pressure Photochemical Vapor Deposition (Photo-CVD): Used for depositing thin films, such as Ta₂O₅ and HfO₂, on electronic substrates.
- Photooxidation and Photothermal Annealing: Enhances the chemical stoichiometry of SiO₂ thin films.
- Room-Temperature Photocatalytic Metallization: Deposition of metal electrodes on plastic surfaces.
- Surface Activation: Improves surface tension and wettability.
- Organic Degradation: Utilized for total organic carbon (TOC) removal, pesticide degradation, and decolorization of dye wastewater.
- High-Purity Ozone Generation.
Industrial application examples
Below are some critical industrial applications of 172nm Excimer Lamps from a technical standpoint. These lamps are widely used in the semiconductor, FPD/LCD/OLED, medical, and pharmaceutical industries, as well as the automotive parts and electric car battery industries, and printing industry. They provide significant technical advantages, increase production efficiency, and help bring many new innovations, inventions, and ideas to life.
Ushio 172nm Excimer Irradiation Units
Ushio offers a comprehensive solution for 172 nm Excimer Irradiation technology. The well-constructed irradiation units come complete with lamps and housings featuring specially designed reflectors, as well as power supplies. In addition to efficient and exceptional technical and customer services from Ushio, these Excimer Irradiation Units meet the highest standards of excellence and can be adopted cost-effectively. Clients can use them in a user-friendly, “plug and play” manner.
Reference example: HP-V Series
High Irradiance Type for Width of 510mm
High Irradiance Type for Width of 1500mm
Customized Power Supply
Contact with us
Please reach out to us if you have any questions or requests regarding Ushio 172nm lamps and equipment. Our dedicated sales team will contact you shortly.
